Quanxin Semiconductor Technology (Wuxi) Co., Ltd

Functional Features
◆It is standardly equipped with the function of self-checking whether there are wafers at the working position.
◆Barcode scanning function: Monitor the wafer process flow.
Technical Parameters
◆The wafer size is suitable for 4 - 12 - inch production lines.
◆The wafer breakage rate is one in ten thousand.
Application Fields
◆In semiconductor integrated circuit production lines, it is used for the mutual transfer of wafers between wafer cassettes, between wafer cassettes and wafer boats.
Equipment Functions
◆The equipment is available in 2-station, 3-station, and 4-station models. It can manually and automatically separate and combine 50-piece and 25-piece loads. It is used for the wafer transfer process of various semiconductor application materials such as 4 - 12 - inch silicon wafers, potassium nitride, gallium arsenide, and sapphire.

Technical Features
◆Number of working stations: You can choose from 2-station, 3-station, or 4-station models.
◆Specification: The processing size can be adjusted from 4 inches to 12 inches.
◆Working rotation speed: Can be set arbitrarily.
◆Static elimination function: Vertically downward fan-shaped static elimination (optional).
◆During operation: Set the speed, time, and torque according to the wafer material, thickness, and the maximum tolerance for wafer breakage.
◆Motor: Equipped with a micro DC motor and a high-precision motor control controller.
◆Synchronous belt drive: It uses a synchronous belt with counterweight for transmission. When encountering resistance, it stops sliding, which can effectively prevent wafer jams and breakages.
◆Safety monitoring: Each working station has boat cassette positioning detection, wafer presence/absence detection, and operating position detection.
◆Controller operation interface: A 7-inch human-machine interface + a PLC programmable automatic controller.
◆Software functions: Manual operation, process selection, parameter setting, warnings, and recipes can all be modified on the operation interface.